Acta Optica Sinica, Volume. 41, Issue 14, 1412002(2021)
Phase Error Analysis and Correction for Phase Shifting Profilometry Using Crossed Grating
Figures & Tables(15)
Fig. 2. Spectrum of grating with nonlinear response. (a) Spectrum of horizontal grating; (b) spectrum of vertical grating; (c) spectrum of crossed grating
Fig. 3. STD of phase error distribution for crossed grating PSP with different phase shifting steps
Fig. 4. Phase error distribution of crossed grating PSP. (a) Horizontal phase error; (b) vertical phase error
Fig. 5. Comparison of phase error distribution. (a) Horizontal phase error; (b) vertical phase error
Fig. 7. Experimental results. (a) Captured grating image; (b) STD of phase errors distribution for crossed grating PSP with different phase shifting step
Fig. 8. Phase error distribution. (a) Horizontal phase error; (b) vertical phase error
Fig. 9. Phase error distribution of four methods. (a) Horizontal phase error; (b) vertical phase error
Fig. 10. Measurement results of a heart-shaped object. (a) Heart-shaped object; (b)(e)(g)(j) five-step PSP; (c)(h)(k) double five-step PSP; (d)(f)(i)(l) five-step PSP with Gamma correction
Table 1. Pre-encoded Gamma values calculated by horizontal sinusoidal grating and vertical sinusoidal grating
View tableTable 1. Pre-encoded Gamma values calculated by horizontal sinusoidal grating and vertical sinusoidal grating
Case Horizontal sinusoidal grating Vertical sinusoidal grating 1 1.701 1.698 2 1.697 1.689 3 1.680 1.673
Table 2. Simulation results of the STD of phase errors for crossed grating PSP
View tableTable 2. Simulation results of the STD of phase errors for crossed grating PSP
Method STD of the horizontal phase errors /rad STD of the vertical phase errors /rad Five-step 0.276 0.276 Fifteen-step 0.247 0.123 Double five-step 0.050 0.050
Table 3. Simulation results of the STD of phase errors by three methods
View tableTable 3. Simulation results of the STD of phase errors by three methods
Method STD of the horizontal phase errors /rad STD of the vertical phase errors /rad Number of grating patterns Five-step 0.276 0.276 5 Double five-step 0.050 0.050 10 Five-step with single carrier 0.002 0.002 10
Table 4. Experimental results of the STD of phase errors for crossed grating PSP
View tableTable 4. Experimental results of the STD of phase errors for crossed grating PSP
Method STD of the horizontal phase errors /rad STD of the vertical phase errors /rad Five-step 0.193 0.215 Thirteen-step 0.181 0.093 Double five-step 0.030 0.038
Table 5. Experimental results of the STD of phase errors by four methods
View tableTable 5. Experimental results of the STD of phase errors by four methods
Method STD of the horizontal phase errors /rad STD of the vertical phase errors /rad Number of grating patterns Time /s Five-step 0.193 0.215 5 2.413 Double five-step 0.030 0.038 10 2.927 Gamma correction 0.017 0.020 5 2.441 Five-step with single carrier 0.016 0.018 10 2.518
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Fuqian Li, Wenjing* Chen. Phase Error Analysis and Correction for Phase Shifting Profilometry Using Crossed Grating[J]. Acta Optica Sinica, 2021, 41(14): 1412002
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Dec. 25, 2020
Accepted: Feb. 22, 2021
Published Online: Jul. 11, 2021
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