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Acta Optica Sinica, Volume. 41, Issue 14, 1412002(2021)

Phase Error Analysis and Correction for Phase Shifting Profilometry Using Crossed Grating

Fuqian Li and Wenjing* Chen
Author Affiliations
  • Department of Optic-Electronic, College of Electronics and Information Engineering, Sichuan University, Chengdu, Sichuan 610065, China
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    Article index updated:May. 20, 2024

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    Fuqian Li, Wenjing* Chen. Phase Error Analysis and Correction for Phase Shifting Profilometry Using Crossed Grating[J]. Acta Optica Sinica, 2021, 41(14): 1412002

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 25, 2020

    Accepted: Feb. 22, 2021

    Published Online: Jul. 11, 2021

    The Author Email:

    DOI:10.3788/AOS202141.1412002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology