Fig. 1. （a） 220 GHz 8×8 Ti superconducting TES detector array； （b） Ti superconducting TES detector， consisting of a twin slot antenna， a bandpass filter， and a leg supporting unit with the size of 400 μm×200 μm； （c） Leg supporting unit， including an Au microstrip absorber and a superconducting Ti TES

Fig. 2. Schematic view of the twin slot antenna （a） and simulated S11 of the twin slot antenna （b） and beam Pattern of the twin slot antenna （c）

Fig. 3. Schematic diagram of the 220 GHz bandpass filter as well as its equivalent circuit （a）， and simulated S₁₁ and S₁₂ parameters of the bandpass filter （b）

Fig. 4. Simulated coupling efficiency

Fig. 5. Schematic of the Au microstrip line used as an absorber （a） and simulated S11 parameter of the Au microstrip line （b）

Fig. 6. Optical micrograph of the leg supporting Ti superconducting TES detector

Fig. 7. Photograph of the 8×8 Ti superconducting TES detector array inside the dilution cooler

Fig. 8. 8×8 superconducting TES detector array （a） and Measured resistance-temperature curves of two superconducting TES detectors （No. 4-4 and 8-3） （b）

Fig. 9. Measured current-voltage curves of the Ti superconducting TES detector （8-3） at different bath temperatures

Fig. 10. Measured DC power of the Ti superconducting TES detector at different bath temperatures

Fig. 11. Measured current noise spectrum of the superconducting TES detector at the bias voltage of 5.3 μV