Optics and Precision Engineering, Volume. 31, Issue 4, 442(2023)
Development of a 220 GHz Ti superconducting TES detector array for CMB polarization experiment
High-sensitivity superconducting transition edge sensor (TES) detectors have significant application prospects in the detection of the B-mode polarization of cosmic microwave background (CMB). In this study, we developed a 220 GHz antenna-coupled titanium (Ti) superconducting TES detector array (8×8) using a leg supporting structure. Before the supporting legs were fabricated, we measured the thermal conductance and the noise equivalent power (NEP) of the Ti superconducting TES detector. The measurement results show that the thermal conductance of the Ti superconducting TES detector, primarily determined by the electron-phonon interaction in the superconducting Ti microbridge, is approximately 485.4 pW/K. Moreover, the NEP of the Ti superconducting TES detector is approximately 5×10-17 W/Hz0.5. In principle, the thermal conductance of the Ti superconducting TES detector can be further reduced after its supporting legs are fabricated, which is approximately 38 pW/K. Meanwhile, the thermal fluctuation noise of the detector after its supporting legs are fabricated is approximately 9.2×10-18 W/Hz0.5. Thus, the noise performance can be further improved.
Get Citation
Copy Citation Text
Qianghui LUO, Wei MIAO, Feiming LI, Jiaqiang ZHONG, Zheng WANG, Jiangqiao DING, Kangmin ZHOU, Wen ZHANG, Yuan REN, Shengcai SHI. Development of a 220 GHz Ti superconducting TES detector array for CMB polarization experiment[J]. Optics and Precision Engineering, 2023, 31(4): 442
Category: Modern Applied Optics
Received: Jun. 17, 2022
Accepted: --
Published Online: Mar. 7, 2023
The Author Email: MIAO Wei (weimiao@pmo.ac.cn), SHI Shengcai (scshi@pmo.ac.cn)