Acta Photonica Sinica, Volume. 34, Issue 5, 734(2005)
Influence of Substrate Bias on the Properties of Hard Carbon Films Prepared by MCECR Sputtering
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Influence of Substrate Bias on the Properties of Hard Carbon Films Prepared by MCECR Sputtering[J]. Acta Photonica Sinica, 2005, 34(5): 734
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