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Acta Photonica Sinica, Volume. 34, Issue 5, 734(2005)

Influence of Substrate Bias on the Properties of Hard Carbon Films Prepared by MCECR Sputtering

[in Chinese]1, [in Chinese]2, [in Chinese]3, and [in Chinese]3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Influence of Substrate Bias on the Properties of Hard Carbon Films Prepared by MCECR Sputtering[J]. Acta Photonica Sinica, 2005, 34(5): 734

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    Paper Information

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    Received: Apr. 8, 2004

    Accepted: --

    Published Online: Jun. 12, 2006

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology