[1] [1] Tang C Y, Liu Y, Lu Z, et a1. Diamond film technology and its application[J]. Superhard Material Engineering, 2007, 19(4): 33-37.

[2] [2] Luann B, Wright D A, Zhang L Y. Growth of diamond films on spherical surfaces by hot filament CVD[J]. Diamond and Related Materials, 1998, 141(7): 129-132.

[3] [3] Nakamori I, Takagi T, Takeno T, et al. Direct simulation of monte carlo analysis of nano-flonting effect on diamond-coated surface[J]. Diamond and Related Materials, 2005, 148(14): 2122-2126.

[4] [4] Daniel Ham C. Status for infrared applications[C]//A Feldman. Proc 3rd Int Conf on Appl. of Diamond Films and Belated Materials. Boulder: NIST, 1995: 539.

[5] [5] Grant Lu, KEVlN G J, Frederick B E, et a1. Free standing white diamond for thermal and optical application[J]. Diamond Films and Related Materials, 1993, 136(2): 1064.

[6] [6] Xiang Bingkun, Zuo Dunwen, Li Duosheng, et al. Study on uniform deposition of spherical diamond film on a large area substrate[J]. Journal of Synthetic Crystals, 2009, 38(1): 33-38. (in Chinese)

[7] [7] Song Qingzhu, Zhang Yichen, Sun Zulai, et al. Design method for the thickness uniformity of thin films deposited by magnetron sputtering process[J]. Vacuum, 2010, 47(6): 6-9. (in Chinese)

[8] [8] Yu He, Wang Tao, Wu Zhiming, et al. Influence of rotation revolution on time evolution of growth uniformity of magnetron sputtered films[J]. Chinese Journal of Vacuum Science and Technology, 2010, 30(2): 149-143. (in Chinese)

[9] [9] Zhang Yichen, Gao Shitie, Chen Wang. On the film thickness uniformity circular via magnetron sputtering with small plane target[J]. Vacuum, 2010, 47(2): 21-26. (in Chinese)

[10] [10] Fu Xiuhua, Yang Yongliang, Liu Guojun, et al. Research of uniformity of diamond-like carbon on extensive head covering[J]. Infrared and Laser Engineering, 2013, 42(1): 181-184. (in Chinese)

[11] [11] Li Kaipeng, Wang Duoshu, Li Chen, et al. Study on optical thin film parameters measurement method[J]. Infrared and Laser Engineering, 2015, 44(3): 1048-1052. (in Chinese)

[12] [12] Li Kaipeng, Wang Duoshu, Wang Jizhou, et al. Research of optical film parameters measuring methods[J]. Vacuum & Cryogenics, 2013, 19(4): 224-227. (in Chinese)