Infrared and Laser Engineering, Volume. 45, Issue 6, 621004(2016)
Setup, simulation and experiment of uniform DLC film deposited by PLD on large hemispherical substrate
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Cheng Yong, Lu Yimin, Guo Yanlong, Huang Guojun, Wang Shuyun, Liu Xu, Cao Haiyuan, Chu Hua, Yang Xue. Setup, simulation and experiment of uniform DLC film deposited by PLD on large hemispherical substrate[J]. Infrared and Laser Engineering, 2016, 45(6): 621004
Paper Information
Category: 先进光学材料
Received: Oct. 24, 2015
Accepted: Nov. 27, 2015
Published Online: Jul. 26, 2016
The Author Email: Yong Cheng (gdyjs@263.net)
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