Fig. 1. Schematic diagram of velocity height ratio (v/h) and deflection angle (θ)

Fig. 2. MTF characterizes the attenuation effect of the system on different frequencies

Fig. 3. Calculation process of edge method

Fig. 4. System composition

Fig. 5. Optical composition of illumination system

Fig. 6. Illumination system simulation results

Fig. 7. Illustration of edge target

Fig. 8. Front view of four-dimensional motion platform

Fig. 9. MTF in TDI direction caused by different stages and speed mismatch

Fig. 10. Effects of different integration levels and different bias angles on MTF in TDI direction and vertical TDI direction

Fig. 11. Structure of collimator

Fig. 12. Wavefront test results of collimator tube (on-axis, off-axis)

Fig. 13. Measured MTF and theoretical MTF of collimator

Fig. 14. The image collected by TDICCD

Fig. 15. The MTF in the TDI direction measured by the edge method

Fig. 16. Speed mismatch ±10% and ±20%

Fig. 17. The effect of speed mismatch on MTF in the TDI direction

Fig. 18. The image obtained with or without drift angle and the MTF in the TDI direction