Infrared and Laser Engineering, Volume. 51, Issue 9, 20220427(2022)
High precision manufacturing and testing of large aperture silicon-based space infrared lens (invited)
[1] Lingxue Wang, Yi Cai. Recent progress and perspectives of infrared optical systems. Infrared Technology, 41, 1-12(2019).
[2] Y F Huang, J Xu, S J Bai. Satellite infrared remote sensing technology and its application in disaster prevention and relief. Spacecraft Recovery & Remote Sensing, 41, 118-126(2020).
[3] Sanyong Deng, Song Yue, Dongliang Zhang, et al. Design of solid-immersion infrared metalens. Infrared and Laser Engineering, 51, 20210360(2022).
[4] X D Li, Y Huang, P Q. Zhang. Infrared imaging system and application. Laser & Infrared, 44, 229-234(2014).
[5] Shijie Li, Chao Xu, Yuetian Huang, et al. Processing technology of cutting ZnS crystal. Infrared and Laser Engineering, 49, 20190567(2020).
[6] S Goel. The current understanding on the diamond machining of silicon carbide. Journal of Physics D: Applied Physics, 47, 243001(2014).
[7] Peng Wang, Hao Zhang, Yapeng Jia, et al. Removal of the single point diamond turning marks by spiral sine trace bonnet polishing process. Infrared and Laser Engineering, 49, 20200212(2020).
[8] Xiaoguang Guo, Xiaoli Wang, Renke Kang, et al. Influence of tool wear on cutting mechanism of single point diamond turning of silicon. Journal of Materials Science and Engineering, 38, 355-362, 381(2020).
[9] H Mohammadi, H Poyraz, D Ravindra, et al. An experimental study on single point diamond turning of an unpolished silicon wafer via micro-laser assisted machining. Advanced Materials Research, 1017, 175-180(2014).
[10] Haidong Zhang, Xiaokun Wang, Donglin Xue, et al. Surface testing method for ultra-large convex aspheric surfaces. Chinese Optics, 12, 1147-1154(2019).
[11] Suping Chang, Tiebang Xie, Rong Dai, et al. High-precision non-contact profile measurement for spherical surfaces and aspherical surfaces. Journal of Physics: Conference Series, 13, 151(2005).
[12] Lingdi Xu, Anli Fang, Jianhai Yu, et al. Ultrasonic-vibration assisted grinding of a zerodour freeform optical mirror. Optics and Precision Engineering, 27, 2564-2570(2019).
[13] [13] Jiang Ziyuan. Study on polishing trajecty planning compliance control of optical mirr machining robot [D]. Beijing: China University of Mining Technology, 2021. (in Chinese)
[14] Zewen Lin, Zhenzhong Wang, Xuepeng Huang, et al. Influence of robotic structural deformation on bonnet polishing removal function. High Power Laser and Particle Beams, 33, 200293(2021).
[15] P Sigmund. Theory of sputtering. I. sputtering yield of amorphous and polycrystalline targets. Phys Rev, 184, 383(1969).
[16] Wenqing Li, Jiyou Zhang, Yonggang Wang, et al. Evolution of full band errors in ion beam processing. Spacecraft Recovery & Remote Sensing, 41, 47-54(2020).
[17] Yonggang Wang, Ang Li, Xiaohui Meng, et al. Thermal effect in ion beam figuring of optical mirror assembly. Spacecraft Recovery & Remote Sensing, 42, 72-78(2021).
[18] Qiushi Yang, Jiyou Zhang, Jianhai Yu, et al. Research on error analysis of support deformation for large aperture space mirrors. Spacecraft Recovery & Remote Sensing, 41, 60-70(2020).
[19] Kejun Wang, Jihong Dong, Pingwei Zhou, et al. Back support structure design of mirror of space remote sensor. Infrared and Laser Engineering, 48, 0718004(2019).
[20] H Liu, X Zhu, R Kang, et al. Three-point-support method based on position determination of supports and wafers to eliminate gravity-induced deflection of wafers. Precision Engineering, 46, 339-348(2016).
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Guoyan Wang, Rui Xu, Qiuyue Yu, Yonggang Wang, Xiaohui Meng. High precision manufacturing and testing of large aperture silicon-based space infrared lens (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220427
Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface
Received: Jun. 22, 2022
Accepted: --
Published Online: Jan. 6, 2023
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