Infrared and Laser Engineering, Volume. 51, Issue 9, 20220427(2022)
High precision manufacturing and testing of large aperture silicon-based space infrared lens (invited)
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Fig. 2. Three-point supporting measurment. （a） Schematic diagram; （b） Distribution of micro displacement on surface; （c） Shape error induced by supporting force
Fig. 3. Results of three coordinate measuring machine. （a） Ultrasonic millling; （b） Robot grinding
Fig. 4. Simulation results of ion beam machining after small mill head grinding. （a）-（f） 10-60 mm ion source beam diameter, respectively
Fig. 5. Convergence trend of ion beam machining simulation after small mill head grinding
Fig. 6. Surface error of the convex side tested by contourgraph-Loop1. （a） 0°; （b） 90°
Fig. 7. Surface error of the convex side tested by contourgraph-Loop2. （a） 0°; （b） 90°
Fig. 8. Residual of machining surface. (a) Grinding of small mill head; (b) Airbag polishing
Fig. 9. Surface error of the convex side based on three-point supporting measurment-Loop3. (a)-(c) 0°; (d)-(f) 180°
Fig. 10. Surface error of the convex side based on three-point supporting measurment-Loop4： (a)-(c) 0°； (d)-(f) 180°
Table 1. Parameters of the convex aspheric surface (
λ =632.8 nm)View tableView in ArticleTable 1. Parameters of the convex aspheric surface (
λ =632.8 nm)R/mm k A B C PV RMS 339.3331±0.1 0 −1.288E-10 −1.283E-15 6.342E-20 1/5λ λ/50
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Guoyan Wang, Rui Xu, Qiuyue Yu, Yonggang Wang, Xiaohui Meng. High precision manufacturing and testing of large aperture silicon-based space infrared lens (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220427
Paper Information
Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface
Received: Jun. 22, 2022
Accepted: --
Published Online: Jan. 6, 2023
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