Optics and Precision Engineering, Volume. 25, Issue 12, 2975(2017)
A displacement measurement system for ultra-precision heterodyne Littrow grating interferometer
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WANG Lei-jie, ZHANG Ming, ZHU Yu, LU Sen, YANG Kai-ming. A displacement measurement system for ultra-precision heterodyne Littrow grating interferometer[J]. Optics and Precision Engineering, 2017, 25(12): 2975
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Received: May. 16, 2017
Accepted: --
Published Online: Jan. 10, 2018
The Author Email: Lei-jie WANG (wang-lj66@mail.tsinghua.edu.cn)
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