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Laser & Optoelectronics Progress, Volume. 54, Issue 3, 31405(2017)

Parameter Optimization of Inductively Coupled Plasma and Its Application on Multi-Wavelength DFB Laser Array

Rao Lan1, Xin Xiangjun1, Li Deng′ao2, Wang Renfan2, and Hu Hai3
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  • 1[in Chinese]
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    Article index updated:May. 20, 2024

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    Rao Lan, Xin Xiangjun, Li Deng′ao, Wang Renfan, Hu Hai. Parameter Optimization of Inductively Coupled Plasma and Its Application on Multi-Wavelength DFB Laser Array[J]. Laser & Optoelectronics Progress, 2017, 54(3): 31405

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Aug. 31, 2016

    Accepted: --

    Published Online: Mar. 8, 2017

    The Author Email:

    DOI:10.3788/lop54.031405

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology