Preparation of Sn-doped Ga<sub>2</sub>O<sub>3</sub> thin films and their solar-blind photoelectric detection performance

Lijun Li; Chengkun Li; Shaoqing Wang; Qin Lu; Yifan Jia; Haifeng Chen

doi:10.1088/1674-4926/44/6/062805

Journal of Semiconductors, Volume. 44, Issue 6, 062805(2023)

Preparation of Sn-doped Ga₂O₃ thin films and their solar-blind photoelectric detection performance

Lijun Li*... Chengkun Li*, Shaoqing Wang*, Qin Lu*, Yifan Jia* and Haifeng Chen* |Show fewer author(s)

Key Laboratory of Advanced Semiconductor Devices and Materials, School of Electronic Engineering, Xi’an University of Posts & Telecommunications, Xi’an 710121, China

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Lijun Li, Chengkun Li, Shaoqing Wang, Qin Lu, Yifan Jia, Haifeng Chen. Preparation of Sn-doped Ga₂O₃ thin films and their solar-blind photoelectric detection performance[J]. Journal of Semiconductors, 2023, 44(6): 062805

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Paper Information

Category: Articles

Received: Nov. 19, 2022

Accepted: --

Published Online: Jul. 6, 2023

The Author Email: Lijun Li (lilijun007@163.com), Chengkun Li (lilijun007@163.com), Shaoqing Wang (lilijun007@163.com), Qin Lu (lilijun007@163.com), Yifan Jia (lilijun007@163.com), Haifeng Chen (lilijun007@163.com)

DOI:10.1088/1674-4926/44/6/062805

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

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