Acta Photonica Sinica, Volume. 52, Issue 7, 0752303(2023)

Influence of Scanning Direction on the Quality of LIPSS on Metal-Si Hybrid Films(Invited)

Liping SHI1,*... Jiao GENG1,**, and Min QIU23,*** |Show fewer author(s)
Author Affiliations
  • 1Advanced Optoelectronic Imaging and Device Laboratory,Hangzhou Institute of Technology,Xidian University,Hangzhou 311231,China
  • 2Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province,School of Engineering,Westlake University,Hangzhou 310024,China
  • 3Institute of Advanced Technology,Westlake Institute for Advanced Study,Hangzhou 310024,China
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    Liping SHI, Jiao GENG, Min QIU. Influence of Scanning Direction on the Quality of LIPSS on Metal-Si Hybrid Films(Invited)[J]. Acta Photonica Sinica, 2023, 52(7): 0752303

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    Paper Information

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    Received: Apr. 6, 2023

    Accepted: May. 15, 2023

    Published Online: Sep. 26, 2023

    The Author Email: SHI Liping (shiliping@westlake.edu.cn), GENG Jiao (gengjiao@westlake.edu.cn), QIU Min (qiumin@westlake.edu.cn)

    DOI:10.3788/gzxb20235207.0752303

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