Acta Photonica Sinica, Volume. 52, Issue 7, 0752303(2023)

Influence of Scanning Direction on the Quality of LIPSS on Metal-Si Hybrid Films(Invited)

Liping SHI1,*... Jiao GENG1,**, and Min QIU23,*** |Show fewer author(s)
Author Affiliations
  • 1Advanced Optoelectronic Imaging and Device Laboratory,Hangzhou Institute of Technology,Xidian University,Hangzhou 311231,China
  • 2Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province,School of Engineering,Westlake University,Hangzhou 310024,China
  • 3Institute of Advanced Technology,Westlake Institute for Advanced Study,Hangzhou 310024,China
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    Figures & Tables(4)
    Scheme of oxidative LIPSS formation on metal/Si hybrid films by femtosecond laser irradiation. The crossing angle between the scanning direction and laser polarization direction is defined as θ,the incident laser polarization is controlled by a half-wave plate
    Optical microscope images of one-dimensional LIPSS obtained by different crossing angles between scanning direction and laser polarization,the scanning direction is along x-axis(V:sample scanning direction;E0:laser polarization direction)
    FDTD-based numerical simulation of electric field distribution at Si-air interface when embedding a silica nanostripe into Pt/Si hybrid film
    Optical microscopy images of periodic nanostructures obtained by zigzag scanning(black arrows)in three different crossing angles between scanning direction and laser polarization(The dotted the solid red circles represent the initial and final position of the laser spot,respectively. The distance between the upper and lower scanning spots is 10 μm. The black box indicates splicing area between the adjacent two scans)
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    Liping SHI, Jiao GENG, Min QIU. Influence of Scanning Direction on the Quality of LIPSS on Metal-Si Hybrid Films(Invited)[J]. Acta Photonica Sinica, 2023, 52(7): 0752303

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    Paper Information

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    Received: Apr. 6, 2023

    Accepted: May. 15, 2023

    Published Online: Sep. 26, 2023

    The Author Email: SHI Liping (shiliping@westlake.edu.cn), GENG Jiao (gengjiao@westlake.edu.cn), QIU Min (qiumin@westlake.edu.cn)

    DOI:10.3788/gzxb20235207.0752303

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