Researching | Controllable step-flow growth of GaN on patterned freestanding substrate

Journal of Semiconductors, Volume. 45, Issue 2, 022501(2024)

Controllable step-flow growth of GaN on patterned freestanding substrate

Peng Wu^1,2,3,4, Jianping Liu^1、*, Lei Hu¹, Xiaoyu Ren¹, Aiqin Tian¹, Wei Zhou¹, Fan Zhang^1,2, Xuan Li¹, Masao Ikeda¹, and Hui Yang^1,2、**

Author Affiliations

¹Key Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China

²School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China

³Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, China

⁴University of Chinese Academy of Sciences, Beijing 100049, China

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Peng Wu, Jianping Liu, Lei Hu, Xiaoyu Ren, Aiqin Tian, Wei Zhou, Fan Zhang, Xuan Li, Masao Ikeda, Hui Yang. Controllable step-flow growth of GaN on patterned freestanding substrate[J]. Journal of Semiconductors, 2024, 45(2): 022501

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Paper Information

Category: Articles

Received: Aug. 17, 2023

Accepted: --

Published Online: Apr. 24, 2024

The Author Email: Liu Jianping (JPLiu), Yang Hui (HYang)

DOI:10.1088/1674-4926/45/2/022501

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology