Optics and Precision Engineering, Volume. 18, Issue 5, 1189(2010)
Ultrasonic precise bonding for polymer micro device based on adaptive pressure control
[1] [1] NG W C.Study of vibration and viscoelastic heating of thermoplastic parts subjected to ultrasonic excitation[D].Columbus Ohio State University, 1996.
[2] [2] DONG J H, XU H.Error analysis on the X-Y table in automatic gold wire bonder[J].Opt.Precision Eng., 2005, 13(Supp.):148-152.(in Chinese)
[3] [3] BOHM S, DILGER K, HESSELBACH J, et al..Micro bonding with non-viscous adhesives[J].Microsystem Technologies, 2006,12(7):676-679.
[4] [4] LI J H, CHEN D, CHEN G.Low-temperature thermal bonding of PMMA microfluidic chips[J].Analytical Letters, 2005,38(7):1127-1136.
[5] [5] ANDRIJASEVIC D, GIOUROUDI L, SMETANA W, et al..New approach to micro-joining by hot gas stream[J].Microelectronic Engineering, 2006,83(4-9):1445-1448.
[6] [6] CHANG CH W, HSU W Y.Characterization of micro resistance welding with electro-thermal actuator for micro assembly[C].Proceedings of SPIE – The International Society for Optical Engineering, 2008,6884:68840G.
[7] [7] YUSSUF A A,SBARSKI I,HAYES J P, et al..Microwave welding of polymeric-microfluidic divices[J].Journal of Micromechanics and Microengineering, 2005,15(9):1692-1699.
[8] [8] SARI F, HOFFMANN W M, HABERSTROH E, et al..Applications of laser transmission processes for the joining of plastics, silicon and glass micro parts[J].Microsystem Technologies, 2008,14(12):1879-1886.
[9] [9] TRUCKENMLLER R, HENZI P, HERRMANN D, et al.Bonding of polymer microstructures by UV irradiation and subsequent welding at low temperatures[J].Microsystem Technologies, 2004,10(5):372-374.
[10] [10] TRUCKENMUELLER R, CHEN Y, AHRENS R, et al..Micro ultrasonic welding: Joining of chemically inert polymer microparts for single material fluidic components and systems[J].Microsystem Technologies, 2006,12(10-11):1027-1029.
[11] [11] KHMELEV V N, SIVIN A N, ABRAMOV A D.Model of process and calculation of energy for a heat generation of a welded joint at ultrasonic welding polymeric thermoplastic materials[C].8th Annual International Workshop and Tutorials on Electron Devices and Materials, EDM'07 – Proceedings, 2007:316-322.
[12] [12] NONHOF C J, LUITEN G A.Estimates for process conditions during the ultrasonic welding of thermoplastics[J].Polymer Engineering and Science, 1996,36(9):1177-1183.
[13] [13] DAI ZH D, WANG M, XUE Q J.Introduction of Friction System Thermodynamics[M].Beijing: National Defense Industry Press, 2002.(in Chinese)
[14] [14] LIN SH Y.The Principle and Design of Ultrasonic Transducer[M].Beijing: Science Press, 2004.(in Chinese)
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SUN Yi-bo, LUO Yi, WANG Xiao-dong. Ultrasonic precise bonding for polymer micro device based on adaptive pressure control[J]. Optics and Precision Engineering, 2010, 18(5): 1189
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Received: Jul. 27, 2009
Accepted: --
Published Online: Aug. 31, 2010
The Author Email: Yi-bo SUN (sun200181410@163.com)
CSTR:32186.14.