Optics and Precision Engineering, Volume. 18, Issue 5, 1189(2010)
Ultrasonic precise bonding for polymer micro device based on adaptive pressure control
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SUN Yi-bo, LUO Yi, WANG Xiao-dong. Ultrasonic precise bonding for polymer micro device based on adaptive pressure control[J]. Optics and Precision Engineering, 2010, 18(5): 1189
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Received: Jul. 27, 2009
Accepted: --
Published Online: Aug. 31, 2010
The Author Email: Yi-bo SUN (sun200181410@163.com)
CSTR:32186.14.
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