Optics and Precision Engineering, Volume. 16, Issue 9, 1666(2008)
Reflectivity measurements of normal-incidence Mo/Si multilayer mirrors at 13.9 and 19.6 nm
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LI Min, DONG Ning-ning, LIU Zhen, LIU Shi-jie, LI Xu, FAN Xian-hong, WANG LI-hui, MA Yue-ying, CHEN Bo. Reflectivity measurements of normal-incidence Mo/Si multilayer mirrors at 13.9 and 19.6 nm[J]. Optics and Precision Engineering, 2008, 16(9): 1666
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Received: Mar. 12, 2008
Accepted: --
Published Online: Feb. 28, 2010
The Author Email: Min LI (limin-ciomp@sohu.com)
CSTR:32186.14.