Optics and Precision Engineering, Volume. 16, Issue 9, 1666(2008)

Reflectivity measurements of normal-incidence Mo/Si multilayer mirrors at 13.9 and 19.6 nm

LI Min1...2,*, DONG Ning-ning1,2, LIU Zhen1,2, LIU Shi-jie1, LI Xu1,2, FAN Xian-hong1,2, WANG LI-hui1,2, MA Yue-ying1 and CHEN Bo1 |Show fewer author(s)
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  • 2[in Chinese]
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    References(10)

    [1] [1] SILVA L B D,BARBEE T W,CAUBLE R,et al..Electron density measurement of high density plasmas using soft X-ray laser interferometry[J].Phys.Rev.Lett.,1995,74(20):3991-3994

    [2] [2] JANULEWICZ K A,LUCIANETTI A,PRIEBE G,et al..Satured Ni-like Ag X-ray laser at 13.9nm pumped by a single picrosecond laser pulse[J].Phys.Rev.A,2003,68(051802):1-4

    [3] [3] SEBBAN S,DAIDO H,SAKAYA N,et al..Full characterization of a high-gain saturated X-ray laser at 13.9nm[J].Phys.Rev.A,2000,61(043810):1-9

    [4] [4] NISHIKINO M,TANAKA M,NAGASHIMA K,et al..Demonstration of a soft X-ray laser at 13.9nm with full spatial coherence[J].Phys.Rev.A,2003,68(061802):1-4

    [6] [6] ZHANG J,WARWICK P J,WOLFRUM E,et al..Saturated output of a GeXXIII X-ray laser at 19.6nm[J].Phys.Rev.A,1996,54(6):4653-4656

    [7] [7] NISEN J,MORENO J,BARBEE T W,et al..Measurement of spatial gain distribution for a neonlike germanium 19.6nm laser[J].Opt.Lett.,1997,22(17):1320-1322

    [8] [8] UNDERWOOD J H,BARBEE T W.Layered synthetic microstructures as Bragg diffractors for X-rays and extreme ultraviolet:theory and predicted performance[J].Appl.Opt.,1981,20(17):3027-3034

    [9] [9] MODI M H,LODHA G S,NAYAK M,et al..Determination of layer structure in Mo/Si multilayers using soft X-ray reflectivity[J].Physcia B,2003,325:272-280

    [10] [10] STEARNS D G.The scattering of X-ray from nonideal multilayer structures[J].J.Appl.Phys,1989,65(2):491-506

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    LI Min, DONG Ning-ning, LIU Zhen, LIU Shi-jie, LI Xu, FAN Xian-hong, WANG LI-hui, MA Yue-ying, CHEN Bo. Reflectivity measurements of normal-incidence Mo/Si multilayer mirrors at 13.9 and 19.6 nm[J]. Optics and Precision Engineering, 2008, 16(9): 1666

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    Paper Information

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    Received: Mar. 12, 2008

    Accepted: --

    Published Online: Feb. 28, 2010

    The Author Email: Min LI (limin-ciomp@sohu.com)

    DOI:

    CSTR:32186.14.

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