Reflectivity measurements of normal-incidence Mo/Si multilayer mirrors at 13.9 and 19.6 nm

LI Min; DONG Ning-ning; LIU Zhen; LIU Shi-jie; LI Xu; FAN Xian-hong; WANG LI-hui; MA Yue-ying; CHEN Bo

Optics and Precision Engineering, Volume. 16, Issue 9, 1666(2008)

LI Min1...2,*, DONG Ning-ning1,2, LIU Zhen1,2, LIU Shi-jie1, LI Xu1,2, FAN Xian-hong1,2, WANG LI-hui1,2, MA Yue-ying1 and CHEN Bo1 |Show fewer author(s)

Author Affiliations

¹[in Chinese]

²[in Chinese]

show less

Figures & Tables(0)

Tools

Get Citation

Copy Citation Text

LI Min, DONG Ning-ning, LIU Zhen, LIU Shi-jie, LI Xu, FAN Xian-hong, WANG LI-hui, MA Yue-ying, CHEN Bo. Reflectivity measurements of normal-incidence Mo/Si multilayer mirrors at 13.9 and 19.6 nm[J]. Optics and Precision Engineering, 2008, 16(9): 1666

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites