Acta Photonica Sinica, Volume. 41, Issue 12, 1488(2012)

Diaphragm Type Optical Fiber MEMS Pressure Sensors Based on F-P Cavity Interference

ZHENG Zhi-xia1、* and HUANG Yuan-qing2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(14)

    [2] [2] YU Qing-xu, ZHOU Xin-lei. Pressure sensor based on the fiber-optic extrinsic fabry-perot interferomenter[J]. Photonic Sensors, 2011, 1(1): 72-83.

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    [4] [4] YU Qing-xu, WANG Xiao-na, SONG Shi-de,et al. Fiber optic pressure sensor system based on extrinsic fabry-perot interferometer for high temperature oil well measurement [J].Journal of Optic electronics Laser, 2007, 18(3): 299-302.

    [5] [5] WU Yi-ming, LI Ming, CHENG Guang-hua. Fabricating micro fiber Fabry-Perot sensor with femtosecond laser pulses[J]. Acta Photonic Sinica, 2010, 39(4): 585-587.

    [6] [6] GUO Zhen-wu, SUN Gui-ling, LI Wei-xiang. Temperature characteristics of optical fiber pressure sensor based on F-P interferometry[J]. Semiconductor Opticelectronics, 2008, 29(3): 418-422.

    [7] [7] ZHANG T, QIANG S, LEWIS F, et al. An optical pressure sensor based on MEMS[J]. Rare Metal Materials and Engineering, 2006, 35(3): 476-478.

    [8] [8] HILL G C, MELAMUD R, DECLERCQ F E, et al. SU-8 MEMS Fabry-Perot pressure sensor[J]. Sensors and Actuators A, 2007, 138(1): 52-62.

    [9] [9] YU Qing-xu, JIA Chun-yan. Diaphragm based miniature f iber optic pressure sensor with F-P cavity[J]. Optics and Precision Engineering, 2009, 17(12): 2887-2891.

    [10] [10] FENG Yong-jian. MEMS high temperature touch-mode capcitive pressure sensor[J]. Chinese Journal of Scientific Instrument, 2006, 27(7): 804-807.

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    ZHENG Zhi-xia, HUANG Yuan-qing. Diaphragm Type Optical Fiber MEMS Pressure Sensors Based on F-P Cavity Interference[J]. Acta Photonica Sinica, 2012, 41(12): 1488

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    Paper Information

    Received: Jul. 9, 2012

    Accepted: --

    Published Online: Dec. 24, 2012

    The Author Email: Zhi-xia ZHENG (zzx72027@163.com)

    DOI:10.3788/gzxb20124112.1488

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