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Acta Photonica Sinica, Volume. 41, Issue 12, 1488(2012)

Diaphragm Type Optical Fiber MEMS Pressure Sensors Based on F-P Cavity Interference

ZHENG Zhi-xia1、* and HUANG Yuan-qing2
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  • 2[in Chinese]
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    ZHENG Zhi-xia, HUANG Yuan-qing. Diaphragm Type Optical Fiber MEMS Pressure Sensors Based on F-P Cavity Interference[J]. Acta Photonica Sinica, 2012, 41(12): 1488

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    Paper Information

    Received: Jul. 9, 2012

    Accepted: --

    Published Online: Dec. 24, 2012

    The Author Email: Zhi-xia ZHENG (zzx72027@163.com)

    DOI:10.3788/gzxb20124112.1488

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology