Optics and Precision Engineering, Volume. 31, Issue 18, 2627(2023)
Effect of magnetic field and target-substrate distance on properties of CrAlN films
[1] [1] 董文杰, 张钧, 孙宇菲, 等. CrN系硬质膜的发展与应用[J]. 材料保护, 2019, 52(12): 129-134.DONGW J, ZHANGJ, SUNY F, et al. Development and application of CrN-based hard films[J]. Materials Protection, 2019, 52(12): 129-134.(in Chinese)
[2] Q X FAN, J J ZHANG, Z H WU et al. Influence of Al content on the microstructure and properties of the CrAlN coatings deposited by arc ion plating. Acta Metallurgica Sinica (English Letters), 30, 1221-1230(2017).
[3] A VYAS, Z ZHOU, Y SHEN. Effect of aluminum contents on sputter deposited CrAlN thin films. IOP Conference Series Materials Science and Engineering, 307(2018).
[4] [4] 王建伟, 薛玉君, 蔡海潮, 等. 基体偏压对磁控溅射制备CrAlN薄膜摩擦学性能的影响[J]. 工具技术, 2019, 53(6)51-54. doi: 10.3969/j.issn.1000-7008.2019.06.011WANGJ W, XUEY J, CAIH C, et al. Effect of substrate bias on friction and wear properties of magnetron sputtered CrAlN films[J]. Tool Engineering, 2019, 53(6)51-54(in Chinese). doi: 10.3969/j.issn.1000-7008.2019.06.011
[5] [5] 姜虎森, 柳琪, 王进, 等. 基材硬度和涂层厚度对AlCrN多元复合纳米硬质涂层硬度的影响[J]. 铸造技术, 2017, 38(10): 2401-2404.JIANGH S, LIUQ, WANGJ, et al. Effect of substrate hardness and coating thickness on the hardness of AlCrN[J]. Foundry Technology, 2017, 38(10): 2401-2404.(in Chinese)
[6] [6] 杨光杰. 阴极弧蒸发沉积Al-Cr-O硬质涂层及其结构和性能研究[D]. 广州:广东工业大学,2021.YANGG J. Study on Structure and Properties of Al-Cr-O Hard Coatings Deposited by Cathodic Arc Evaporation[D]. Guangzhou: Guangdong University of Technology, 2021. (in Chinese)
[7] L Y LIU, S S LIN, W WANG et al. Effect of electromagnetic voltage on wear resistance of CrAlN coatings. Surface Engineering, 37, 695-701(2021).
[8] T C WANG, T SHAO, Q ZHAO et al. Effect of magnetic field on the thickness uniformity of thin film deposited on inner surface. Surface and Coatings Technology, 429, 127974(2021).
[9] [9] 孙国威, 陈泽昊, 李云珂, 等. 靶基距对杂化离子镀TiCN薄膜结构和性能的影响[J]. 真空, 2018, 55(2): 19-22. doi: 10.13385/j.cnki.vacuum.2018.02.05SUNG W, CHENZ H, LIY K, et al. Effects of target-substrate distance on structure and properties of TiCN thin films by hybrid ion plating[J]. Vacuum, 2018, 55(2): 19-22.(in Chinese). doi: 10.13385/j.cnki.vacuum.2018.02.05
[10] W CHEN, Y LIN, J ZHENG et al. Preparation and characterization of CrAlN/TiAlSiN nano-multilayers by cathodic vacuum arc. Surface and Coatings Technology, 265, 205-211(2015).
[11] PJ MARTIN, A BENDAVID. Review of the filtered vacuum arc process and materials deposition. Thin Solid Films, 394, 1-14(2001).
[12] R BOXMAN, I BEILIS, E GIDALEVICH et al. Magnetic control, in vacuum arc deposition: a review. IEEE transactions on plasma science, 33, 1618-1625(2005).
[13] SN CHEN, YF ZHANG, YM ZHAO et al. Preparation and regulation of AlCrNiTiSi high entropy alloy coating by a multi-arc magnetic filter cathode vacuum arc system. Surfaces and Interfaces, 26, 101400(2021).
[14] Y MA, J YANG, X TIAN et al. Enhanced Discharge and Surface Properties of TiSiCN Coatings by Pulse-Enhanced Vacuum Arc Evaporation(2019).
[15] M SAMUELSSON, D LUNDIN, J JENSEN et al. On the film density using high power impulse magnetron sputtering. Surface and Coatings Technology, 205, 591-596(2010).
[16] [16] 郑锦华, 刘青云, 李志雄. 负偏压对含氢类金刚石薄膜性能的影响[J]. 光学 精密工程, 2022, 30(4): 411-420. doi: 10.37188/OPE.20223004.0411ZHENGJ H, LIUQ Y, LIZ X. Effect of negative bias voltage on properties of hydrogenated diamond-like carbon films[J]. Opt. Precision Eng., 2022, 30(4): 411-420.(in Chinese). doi: 10.37188/OPE.20223004.0411
[17] [17] 郑锦华, 李聪慧, 张冲, 等. 不同金属基材上类金刚石薄膜的摩擦特性[J]. 光学 精密工程, 2013, 21(6): 1545-1552. doi: 10.3788/ope.20132106.1545ZHENGJ H, LIC H, ZHANGC, et al. Friction properties of DLC film on different metal substrates[J]. Opt. Precision Eng., 2013, 21(6): 1545-1552. (in Chinese). doi: 10.3788/ope.20132106.1545
[18] T VUCHKOV, M EVARISTO, TB YAQUB et al. The effect of substrate location on the composition, microstructure and mechano-tribological properties of W-S-C coatings deposited by magnetron sputtering. Surface and Coatings Technology, 386, 125481(2020).
[19] [19] 郑锦华, 晁云峰, 张冲, 等. 射频磁控溅射法沉积SiC-Al薄膜的摩擦特性[J]. 真空科学与技术学报, 2014, 34(11): 1178-1183. doi: 10.13922/j.cnki.cjovst.2014.11.09ZHENGJ H, CHAOY F, ZHANGC, et al. Tribological properties of RF magnetron sputtered SiC-Al coatings[J]. Chinese Journal of Vacuum Science and Technology, 2014, 34(11): 1178-1183. (in Chinese). doi: 10.13922/j.cnki.cjovst.2014.11.09
[20] [20] 郑锦华,张冲,晁云峰,等. 类陨石坑表面类金刚石薄膜的制备及摩擦特性[J]. 光学 精密工程, 2014, 22(4): 934-941. doi: 10.3788/ope.20142204.0934ZHENGJ H, ZHANGCH, CHAOY F, et al. Deposition and friction properties of DLC films with micro-crater-like structures[J]. Opt. Precision Eng., 2014, 22(4): 934-941. (in Chinese). doi: 10.3788/ope.20142204.0934
[21] [21] 王欣, 范其香, 王铁钢, 等. CrAlN纳米复合涂层的组织结构及切削性能研究[J]. 材料保护, 2021, 54(4): 63-68.WANGX, FANQ X, WANGT G, et al. The microstructure and cutting property of CrAlN nanocomposite coating[J]. Materials Protection, 2021, 54(4): 63-68. (in Chinese)
[22] [22] 汪陇亮, 孙润军, 单磊, 等. CrAlN涂层海水环境腐蚀磨损行为研究[J]. 摩擦学学报, 2017, 37(5): 639-646.WANGL L, SUNR J, SHANL, et al. Tribocorrosion behaviors of CrAlN coating in seawater[J]. Tribology, 2017, 37(5): 639-646. (in Chinese)
[23] X ZHANG, X TIAN, C GONG et al. Effect of plasma nitriding ion current density on tribological properties of composite CrAlN coatings. Ceramics International, 48, 3954-3962(2022).
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Jinhua ZHENG, Shiyang MEI, Zhixiong LI, Qingyun LIU. Effect of magnetic field and target-substrate distance on properties of CrAlN films[J]. Optics and Precision Engineering, 2023, 31(18): 2627
Category: Modern Applied Optics
Received: Apr. 12, 2023
Accepted: --
Published Online: Oct. 12, 2023
The Author Email: LI Zhixiong (lzxiong314@163.com)