Acta Optica Sinica, Volume. 40, Issue 5, 0522001(2020)
Graded Multilayer Film Design Method of Anamorphic Magnification Extreme Ultraviolet Lithography Objective System
Article index updated:May. 21, 2024
Get Citation
Copy Citation Text
Mo Liu, Yanqiu Li. Graded Multilayer Film Design Method of Anamorphic Magnification Extreme Ultraviolet Lithography Objective System[J]. Acta Optica Sinica, 2020, 40(5): 0522001
Category: Optical Design and Fabrication
Received: Sep. 19, 2019
Accepted: Nov. 26, 2019
Published Online: Mar. 10, 2020
The Author Email: Li Yanqiu (liyanqiu@bit.edu.cn)