Acta Photonica Sinica, Volume. 50, Issue 11, 1112005(2021)

Fluorescence Microscopic Stereo Imaging Method to Measure the Depth of Subsurface Damage of Optical Components

Xiaotian QIU1... Ailing TIAN1,*, Dasen WANG2, Xueliang ZHU1, Bingcai LIU1 and Hongjun WANG1 |Show fewer author(s)
Author Affiliations
  • 1School of Optoelectronic Engineering,Xi'an Technology University,Xi'an 710021,China
  • 2Inner Mongolia Metal Material Research Institute,Ningbo,Zhejiang 315103,China
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    References(15)

    [3] Hualin WANG. Study of the position of subsurface damage depth based on total internal reflection method(2016).

    [4] Yan DENG, Qiao XU, Liqun CHAI et al. Total internal reflection microscopy :a subsurface defects identification technique in optically transparent components. High Power Laser and Particle Beams, 21, 835-840(2009).

    [5] Funian CAO, Junpeng BU, Rangyuan WU et al. Quantitative measurement of subsurface damage layer thickness in polished SI-GaAs wafers by X-Ray rocking curve FWHM. Chinese Journal of Semiconductors, 19, 635-638(1998).

    [6] Hongjie LIU, Fengrui WANG, Feng GENG et al. Nondestructive detection of optics subsurface defects by fluorescence image technoque. Optics and Precision Engineering, 28, 50-59(2020).

    [7] Zhengdeng JIANG. Research and pplication of subsurface damage techniques based on fluorescence microscopy(2019).

    [9] Jianpu ZHANG, Huanyu SUN, Shiling WANG et al. Threee-dimension reconstruction technology of subsurface defects in fused silica optical components. Acta Optica Sinica, 40, 141-151(2020).

    [10] Jianpu ZHANG. Research on key technologies of subsurface/body defect detection of fused quartz optical elements(2020).

    [15] Jing HOU, Hongxiang WANG, Chu WANG et al. Nondestructive fluorescence detection method for subsurface damage depth of optics. Journal of Harbin Institute of Technology, 50, 17-22(2018).

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    Xiaotian QIU, Ailing TIAN, Dasen WANG, Xueliang ZHU, Bingcai LIU, Hongjun WANG. Fluorescence Microscopic Stereo Imaging Method to Measure the Depth of Subsurface Damage of Optical Components[J]. Acta Photonica Sinica, 2021, 50(11): 1112005

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Apr. 7, 2021

    Accepted: Jul. 15, 2021

    Published Online: Dec. 2, 2021

    The Author Email: TIAN Ailing (ailintian@xatuedu.cn)

    DOI:10.3788/gzxb20215011.1112005

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