Acta Photonica Sinica, Volume. 50, Issue 11, 1112005(2021)
Fluorescence Microscopic Stereo Imaging Method to Measure the Depth of Subsurface Damage of Optical Components
Fig. 4. Fluorescence microscopic stereo imaging measurement system
Fig. 9. Measurement results of measured parts with different depths of SSD
Get Citation
Copy Citation Text
Xiaotian QIU, Ailing TIAN, Dasen WANG, Xueliang ZHU, Bingcai LIU, Hongjun WANG. Fluorescence Microscopic Stereo Imaging Method to Measure the Depth of Subsurface Damage of Optical Components[J]. Acta Photonica Sinica, 2021, 50(11): 1112005
Category: Instrumentation, Measurement and Metrology
Received: Apr. 7, 2021
Accepted: Jul. 15, 2021
Published Online: Dec. 2, 2021
The Author Email: TIAN Ailing (ailintian@xatuedu.cn)