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Optics and Precision Engineering, Volume. 25, Issue 1, 133(2017)

Meter-scale thin film coating equipment based on meniscus-coating technology

XU Jia1... XU Wen-bin1, BU He-yang1, LU Zheng-wu1, LIU Zheng-kun2, HONG Yi-lin2 and YU Wei-xing3 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    XU Jia, XU Wen-bin, BU He-yang, LU Zheng-wu, LIU Zheng-kun, HONG Yi-lin, YU Wei-xing. Meter-scale thin film coating equipment based on meniscus-coating technology[J]. Optics and Precision Engineering, 2017, 25(1): 133

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    Received: Jun. 20, 2016

    Accepted: --

    Published Online: Mar. 10, 2017

    The Author Email:

    DOI:10.3788/ope.20172501.0133

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology