Acta Optica Sinica, Volume. 43, Issue 9, 0914001(2023)

Uniformity Removal Based on Processing Prediction Model of Ring-Pendulum Double-Sided Polishing Method

Chunyang Wang1,2, Wen Shuai2, Bo Xiao3、*, Siling Huang4, and Dasen Wang4
Author Affiliations
  • 1Xi'an Key Laboratory of Active Photoelectric Imaging Detection Technology, Xi'an Technological University, Xi'an 710021, Shaanxi , China
  • 2School of Electronic and Information Engineering, Changchun University of Science and Technology, Changchun 130022, Jilin , China
  • 3School of Optoelectronic Engineering, Xi'an Technological University, Xi'an 710021, Shaanxi , China
  • 4Ningbo Branch of Chinese Academy of Ordnance Science, Ningbo 315103, Zhejiang , China
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    Figures & Tables(14)
    Structure diagram of ring pendulum double-sided rapid polishing machine
    ANSYS static pressure modeling simulation
    Schematic diagram of kinematic analysis of abrasive particles
    Inspection results of components. (a) Comparison of actual machining and simulation results of 1# workpiece; (b) comparison of actual machining and simulation results of 2# workpiece; (c) comparison of actual machining and simulation results of 3# workpiece
    Distributions of removal amount from upper and lower surfaces of workpiece. (a) Distribution of removal amount on upper surface; (b) distribution of removal amount on lower surface
    Average removal amount of upper and lower surfaces of workpiece under different groups of parameters
    Mean square error of removal amount of upper and lower surfaces under different groups of parameters
    Trajectory distributions of polishing abrasive particles under different center eccentricity. (a) Center eccentricity is 0 mm; (b) center eccentricity is 15 mm; (c) center eccentricity is 30 mm; (d) center eccentricity is 45 mm; (e) center eccentricity is 60 mm
    Trajectory distributions of polishing abrasive particles under different radial swing distances. (a) Radial swing distance is 0 mm; (b) radial swing distance is 15 mm; (c) radial swing distance is 30 mm; (d) radial swing distance is 45 mm; (e) radial swing distance is 60 mm
    Trajectory distributions of polishing abrasive particles under different radial swing speed. (a) Radial swing speed is 1 mm/s; (b) radial swing speed is 3 mm/s; (c) radial swing speed is 5 mm/s; (d) radial swing speed is 7 mm/s; (e) radial swing speed is 9 mm/s
    Initial surfaces of different workpieces. (a) Initial surface of 1# workpiece; (b) initial surface of 2# workpiece
    Inspection results of experimental components. (a) Machined surface of 1# workpiece; (b) machined surface of 2# workpiece
    • Table 1. Configuration of simulation machining parameters

      View table

      Table 1. Configuration of simulation machining parameters

      Workpiece numberCenter eccentricity distance of upper disk /mmRadial swing distance of upper disk /mmRadial swing velocity of upper disk /(mm·s-1
      1#40101
      2#20303
      3#30206
    • Table 2. Configuration of experimental processing parameters

      View table

      Table 2. Configuration of experimental processing parameters

      Workpiece numberCenter eccentricity distance of upper disk /mmRadial swing distance of upper disk /mmRadial swing velocity of upper disk /(mm·s-1
      1#15157
      2#30601
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    Chunyang Wang, Wen Shuai, Bo Xiao, Siling Huang, Dasen Wang. Uniformity Removal Based on Processing Prediction Model of Ring-Pendulum Double-Sided Polishing Method[J]. Acta Optica Sinica, 2023, 43(9): 0914001

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Oct. 21, 2022

    Accepted: Dec. 16, 2022

    Published Online: May. 9, 2023

    The Author Email: Xiao Bo (13610701380@126.com)

    DOI:10.3788/AOS221863

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