Acta Photonica Sinica, Volume. 35, Issue 5, 783(2006)

Auto-controlled Liquid Crystal Light Valve Arrays as Photolithography Shutter

Chen Yun*
Author Affiliations
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    Chen Yun. Auto-controlled Liquid Crystal Light Valve Arrays as Photolithography Shutter[J]. Acta Photonica Sinica, 2006, 35(5): 783

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    Paper Information

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    Received: Feb. 22, 2005

    Accepted: --

    Published Online: Jun. 3, 2010

    The Author Email: Yun Chen (tutorye@163.com)

    DOI:

    CSTR:32186.14.

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