Acta Photonica Sinica, Volume. 35, Issue 5, 783(2006)
Auto-controlled Liquid Crystal Light Valve Arrays as Photolithography Shutter
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Chen Yun. Auto-controlled Liquid Crystal Light Valve Arrays as Photolithography Shutter[J]. Acta Photonica Sinica, 2006, 35(5): 783
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Received: Feb. 22, 2005
Accepted: --
Published Online: Jun. 3, 2010
The Author Email: Yun Chen (tutorye@163.com)
CSTR:32186.14.
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