Journal of Semiconductors, Volume. 45, Issue 8, 082101(2024)

Embedded high-quality ternary GaAs1−xSbx quantum dots in GaAs nanowires by molecular-beam epitaxy

Xiyu Hou1,2, Lianjun Wen1, Fengyue He1,2, Ran Zhuo1, Lei Liu1, Hailong Wang1,2, Qing Zhong1, Dong Pan1,2、*, and Jianhua Zhao1,2、**
Author Affiliations
  • 1State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(4)
    (Color online) (a)−(d) Schematic illustration of the growth process of embedded GaAs1−xSbx quantum dots. (a) Ga droplets formed on the Si (111) substrate; (b) GaAs nanowires grown on the Si (111) substrate; (c) GaAs1−xSbx quantum dots grown on the top of GaAs nanowires; (d) upper GaAs nanowires grown on the top of GaAs1−xSbx quantum dots; (e) and (f) side-view SEM images of GaAs nanowires and GaAs nanowires with embedded GaAs1−xSbx quantum dots, respectively.
    (Color online) (a) TEM image of an embedded GaAs0.8Sb0.2 quantum dot grown at 590 °C. The rectangles highlight the regions where the HRTEM images were recorded; (b) HAADF-STEM image and the corresponding EDS line scan; (c)−(e) false color EDS maps of the GaAs0.8Sb0.2 quantum dot; (f) HRTEM image of the bottom GaAs (blue rectangular in panel (a)); (g) the corresponding FFT image of panel (f); (h) HRTEM image of the GaAs/GaAs0.8Sb0.2/GaAs (red rectangular in panel (a)); (i) HRTEM image of the GaAs0.8Sb0.2 quantum dot (green rectangular in panel (a)); (j) the corresponding FFT image of panel (i); (k) HRTEM image of the upper GaAs (orange rectangular in panel (a)); (l) the corresponding FFT image of panel (k); compared to the panel (a), panel (f), (h), (i) and (k) were rotated 90 degrees.
    (Color online) (a)−(d) Schematic illustration of the growth process of embedded GaAs1−xSbx quantum dots covered with spontaneous GaAs passivation layers. (a) Ga droplets formed on the Si (111) substrate; (b) GaAs nanowires grown on the Si (111) substrate; (c) GaAs1−xSbx quantum dots grown on the top of GaAs nanowires; (d) the upper GaAs nanowires and spontaneous GaAs passivation layers grown simultaneously on the GaAs1−xSbx quantum dots; (e) and (f) side-view SEM images of nanowires with GaAs1−xSbx quantum dots grown at 510 and 530 °C, respectively.
    (Color online) (a) TEM image of an embedded GaAs0.58Sb0.42 quantum dot covered with a spontaneous GaAs passivation layer grown at 530 °C. The rectangles in Fig. 4(a) highlight the regions where the HRTEM images were recorded; (b) HAADF-STEM image and the corresponding EDS line scan; (c)−(e) false color EDS maps of the GaAs0.58Sb0.42 quantum dot; (f) HRTEM image of the bottom GaAs (blue rectangular in panel (a)); (g) the corresponding FFT image of panel (f); (h) HRTEM image of the GaAs/GaAs0.58Sb0.42/GaAs (red rectangular in panel (a)); (i) HRTEM image of the GaAs/GaAs0.58Sb0.42/GaAs (green rectangular in panel (h)); (j) HRTEM image of the upper GaAs (orange rectangular in panel (a)); (k) the corresponding FFT image of panel (j); compared to the panel (a), panel (f), (h), (i) and (j) were rotated 90 degrees.
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    Xiyu Hou, Lianjun Wen, Fengyue He, Ran Zhuo, Lei Liu, Hailong Wang, Qing Zhong, Dong Pan, Jianhua Zhao. Embedded high-quality ternary GaAs1−xSbx quantum dots in GaAs nanowires by molecular-beam epitaxy[J]. Journal of Semiconductors, 2024, 45(8): 082101

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    Paper Information

    Category: Articles

    Received: Mar. 31, 2024

    Accepted: --

    Published Online: Aug. 27, 2024

    The Author Email: Pan Dong (pandong@semi.ac.cn), Zhao Jianhua (jhzhao@semi.ac.cn)

    DOI:10.1088/1674-4926/24030038

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