Spectroscopy and Spectral Analysis, Volume. 29, Issue 1, 268(2009)
XPS and Raman Spectral Analysis of Nitrogenated Tetrahedral Amorphous Carbon (ta-C:N) Films with Different Nitrogen Content
[1] [1] Liu A Y,Cohen M L.Science,1989,245:841.
[2] [2] Stephen.Muhl,Juan Manuel,Mendez.Diamond and Related Materials,1999,8:1809.
[3] [3] Shi X,Fu H,Shi J R.J.Phys.:Condens Matter,1998,10:9293.
[4] [4] Zhang X W,Cheung W Y,Wong S P.Thin Solid Films, 2003,429:261.
[7] [7] Sette F,Wertheim G K,Ma Y,et al.Physical Review B,1990,41 (14):9766.
[8] [8] Mizokawa Y,Miyasato T,Nakamura S,et al.Journal Vacuum Sience & Technology A:Vacuum,Surfaces and Films,1987,5(5):2819.
[9] [9] Kleinsorge B,Ferrari A C,Robertso J,et al.Diamond and Related Materials,2000,9:643.
[10] [10] Robertson J,Davis C A.Diamond and Related Materials,1995,4:441.
[11] [11] Rodil S E,Muhl S.Diamond and Related Materials,2004,13:1521.
[12] [12] Panwar O S,Aparna Y,Shivaprasad S M.Applied Surface Science,2004,221:392.
[13] [13] Ferrari A C,Rodil S E,Robertson J.Physical Review B,2003,67:155306.
[14] [14] Chen C W,Robertson J.Carbon,1999,37:839.
[15] [15] Hu Jiangtao,Yang Peidong,Lieber Charles M.Physical Review B,1998,57:51006-5.
[16] [16] Kleinsorge B,Ferrari A C,Robertson J,et al.Journal of Applied Physics,2000,88:1149.
[17] [17] Robertson J.Materials Science and Engineering,2002,A37:129.
[18] [18] Shi J R,Shi X,Sun Z,et al.Thin Solid Films,2000,366:169.
[19] [19] Rodil S E,Muhl S,Maca S,et al.Thin Solid Films,2003,433:119
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CHEN Wang-shou, ZHU Jia-qi, HAN Jie-cai, TIAN Gui, TAN Man-lin. XPS and Raman Spectral Analysis of Nitrogenated Tetrahedral Amorphous Carbon (ta-C:N) Films with Different Nitrogen Content[J]. Spectroscopy and Spectral Analysis, 2009, 29(1): 268
Received: Oct. 26, 2007
Accepted: --
Published Online: Dec. 9, 2009
The Author Email: Wang-shou CHEN (chenwangshou123@163.com)