Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Infrared and Laser Engineering, Volume. 53, Issue 1, 20230444(2024)

Research on jitter compensation algorithm in spectral confocal thickness measurement system

Chunyan Li, Danlin Li*, Jihong Liu, Chang Liu, Ke Li, and Jiewei Jiang
Author Affiliations
  • School of Electronic Engineering, Xi'an University of Posts & Telecommunications, Xi'an 710121, China
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (11)
    Equations (15)
    References (18)
    Tools
    Paper Information
    Topics
    References(18)

    [1] F Z Fang, X D Zhang, A Weckenmann, et al. Manufacturing and measurement of freeform optics. CIRP Annals, 62, 823-846(2013).

    [2] Qing Yu, Kun Zhang, Ruilan Zhou, et al. Method of thickness measurement for transparent specimens with chromatic confocal microscopy. Applied Optics, 57, 9722-9728(2018).

    [3] J Jonkman, C M Brown, G D Wright, et al. Tutorial: guidance for quantitative confocal microscopy. Nature Protocols, 15, 1585-1611(2020).

    [4] H Nouira, N El-hayek, X Yuan, et al. Characterization of the main error sources of chromatic confocal probes for dimensional measurement. Measurement Science and Technology, 25, 044011(2014).

    [5] M E Fuerst, E Csencsics, C Haider, et al. Confocal chromatic sensor with an actively tilted lens for 3D measurement. Journal of the Optical Society of America A, 37, B46(2020).

    [6] Jianian Lin, Zongyue Cheng, Wenbiao Gan, et al. Jitter suppression for resonant galvo based high-throughput laser scanning systems. Optics Express, 28, 26414(2020).

    [7] N Bottenus, W Long, H K Zhang, et al. Feasibility of swept synthetic aperture ultrasound imaging. IEEE Transactions on Medical Imaging, 35, 1676-1685(2016).

    [8] Jianing Yao, A Anderson, J P Rolland. Point-cloud noncontact metrology of freeform optical surfaces. Optics Express, 26, 010242(2018).

    [9] Wanbin Zhu, Jun Zhong, Renyun Mo, . Design of Spectral Confocal Chromatic Displacement Sensor Objective. Opto-Electronic Engineering, 37, 62-66(2010).

    [10] G Molesini, G Pedrini, P Poggi, et al. Focus-wavelength encoded optical profilometer. Optics Communications, 49, 229-233(1984).

    [11] Qing Yu, Kun Zhang, Ruilan Zhou, et al. Calibration of a chromatic confocal microscope for measuring a colored specimen. IEEE Photonics Journal, 10, 1-9(2018).

    [12] H Chen, L Chen. Full-field chromatic confocal microscopy for surface profilometry with sub-micrometer accuracy. Optics and Lasers in Engineering, 1-13(20231612).

    [13] Chunyan Li, Gengpeng Li, Jihong Liu, et al. Influence of eccentricity and tilt of radial grin lens on its thickness measurement by chromatic confocal technology. Optical Engineering, 60, 094107(2021).

    [14] Chunyan Li, Gengpeng Li, Jihong Liu, . Analysis and research on spectral confocal displacement measurement method based on GRNN. Acta Photonica Sinica, 51, 0330001(2022).

    [15] H T Yura. Optimum truncation of a gaussian beam in the presence of random jitter. Journal of the Optical Society of America A, 12, 375-379(1995).

    [16] A Darafon, A Warkentin, R Bauer. Characterization of grinding wheel topography using a white chromatic sensor. international journal of machine tools and manufacture. International Journal of Machine Tools and Manufacture, 70, 22-31(2013).

    [17] Xiaojun Ma, Dangzhong Gao, Mengsheng Yang, . Measurement of thickness of metal thin film by using chromatic confocal spectral technology. Optics and Precision Engineering, 19, 17-22(2011).

    [18] D L Coutu, K D Kokkallaris, L Kunz, et al. Multicolor quantitative confocal imaging cytometry. Nature Methods, 15, 39-46(2018).

    Tools

    Get Citation

    Copy Citation Text

    Chunyan Li, Danlin Li, Jihong Liu, Chang Liu, Ke Li, Jiewei Jiang. Research on jitter compensation algorithm in spectral confocal thickness measurement system[J]. Infrared and Laser Engineering, 2024, 53(1): 20230444

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category:

    Received: Jul. 14, 2023

    Accepted: --

    Published Online: Mar. 19, 2024

    The Author Email: Li Danlin (18909196613@163.com)

    DOI:10.3788/IRLA20230444

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology