Infrared and Laser Engineering, Volume. 53, Issue 1, 20230444(2024)
Research on jitter compensation algorithm in spectral confocal thickness measurement system
Figures & Tables(11)
Fig. 1. Schematic diagram of spectral confocal thickness measurement system
Fig. 3. Relational model of the influence of jitter on spectral confocal thickness measurement
Fig. 4. Effect of jitter on thickness measurement. (a) Thickness PDF of 4 samples under different random jitter; (b) Comparison between PDF analysis results of thickness
Fig. 6. Experimental system diagram of spectral confocal thickness measurement
Fig. 7. Spectral images after denoising by each filtering method. (a) Mean filtering; (b) Median filtering; (c) Gaussian filtering; (d) S-G filtering
Fig. 8. The denoising effect of each filtering method. (a) SNR; (b) RMSE
Table 1. Performance comparison of five peak extraction methods
View tableView in ArticleTable 1. Performance comparison of five peak extraction methods
Peak localization method Extraction wavelength λ1/nm Extraction error λ1/nm Extremum method 500.21 0.21 Centroid method 500.01 0.01 Weighted centroid method 500.01 0.01 Polynomial fitting method 500.11 0.11 Gauss fitting method 500.00 0
Table 2. Experimental measurement result
View tableView in ArticleTable 2. Experimental measurement result
Stable multipoint measurement H0/mm Moving measurement (before compensation) H/mm Moving measurement (after compensation) H′/mm Error (before compensation) ΔH/μm Error (after compensation) ΔH'/μm 1.0643 1.0815 1.0661 17.2 1.8 1.0640 1.0857 1.0672 21.7 3.2 1.0642 1.0806 1.0661 16.4 1.9 1.0642 1.0835 1.0672 19.3 3.0 1.0639 1.0832 1.0670 19.3 3.1 1.0640 1.0810 1.0657 17.0 1.7 1.0641 1.0818 1.0665 17.7 2.4 1.0637 1.0808 1.0660 17.1 2.3 1.0641 1.0800 1.0659 15.9 1.8 1.0643 1.0843 1.0679 20.0 3.6 1.0641 1.0838 1.0679 19.7 3.8 1.0639 1.0837 1.0675 19.8 3.6 1.0639 1.0842 1.0673 20.3 3.4 1.0639 1.0841 1.0674 20.2 3.5 1.0642 1.0850 1.0674 20.8 3.2 1.0640 1.0830 1.0670 19.0 3.0 1.0643 1.0855 1.0672 21.2 2.9 1.0638 1.0829 1.0671 19.1 3.3 1.0638 1.0850 1.0676 21.2 3.8 1.0642 1.0849 1.0677 20.7 3.5
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Chunyan Li, Danlin Li, Jihong Liu, Chang Liu, Ke Li, Jiewei Jiang. Research on jitter compensation algorithm in spectral confocal thickness measurement system[J]. Infrared and Laser Engineering, 2024, 53(1): 20230444
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Received: Jul. 14, 2023
Accepted: --
Published Online: Mar. 19, 2024
The Author Email: Li Danlin (18909196613@163.com)
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