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Piezoelectrics & Acoustooptics, Volume. 42, Issue 3, 394(2020)

Failure Modes and Research Progress of MEMS Gyroscope in High Overload Attitude Measurement

QING Ze, MU Dong, LIAN Pu, and I Dongjie
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    QING Ze, MU Dong, LIAN Pu, I Dongjie. Failure Modes and Research Progress of MEMS Gyroscope in High Overload Attitude Measurement[J]. Piezoelectrics & Acoustooptics, 2020, 42(3): 394

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    Paper Information

    Received: Jan. 18, 2020

    Accepted: --

    Published Online: Apr. 21, 2022

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2020.03.025

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology