Piezoelectrics & Acoustooptics, Volume. 42, Issue 3, 394(2020)

Failure Modes and Research Progress of MEMS Gyroscope in High Overload Attitude Measurement

QING Ze, MU Dong, LIAN Pu, and I Dongjie
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    The attitude measurement under the conditions of high overload is a recognized problem, mainly because the angular velocity sensor is difficult to withstand the impact of high overload. The gyroscope based on micro electro mechanical system (MEMS) technology is the core device to solve the problem of attitude measurement of high overload. Its ability to resist high overload directly restricts the application of inertial navigation system in high overload environment. First, the characteristics of two typical high-overload environments for ammunition launch and penetration are introduced, and the response types of MEMS gyroscope in high-overload environments are summarized. Secondly, the failure modes of MEMS gyroscope under the conditions of high overload are summarized, including complete failure and functional failure. Then, the research progress of MEMS gyroscope with high overload resistance at home and abroad is introduced. Finally, from the perspective of device design and engineering applications, the design method and application ideas of MEMS gyroscope with high overload resistance are proposed.

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    QING Ze, MU Dong, LIAN Pu, I Dongjie. Failure Modes and Research Progress of MEMS Gyroscope in High Overload Attitude Measurement[J]. Piezoelectrics & Acoustooptics, 2020, 42(3): 394

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    Paper Information

    Received: Jan. 18, 2020

    Accepted: --

    Published Online: Apr. 21, 2022

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2020.03.025

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