[1] [1] WANG X J,WANG F.Study of micro mechanical size inspection technology by microscope precision digital image[J].Opt.Precision Eng.,2001,9(6):511-513.(in Chinese)

[2] [2] REMBE C,KANT R,MULLER R S.Optical measurement methods to study dynamic behavior in MEMS[J].SPIE,2001,4400:127-137.

[3] [3] CHEN Z,HU X D,JIN C Y,et al..Nanoscale measurement technique of in-plane motion for MEMS based on phase correlation method[J].SPIE,2006,6357:63573p1-7.

[4] [4] JIN C Y,LI D CH,JIN SH J,et al..Measurement technique of In-plane motion for MEMS based on block matching[J].Journal of Jilin University of Technology,2004,34(3):445-448.(in Chinese)

[5] [5] ZHANG SH J,HU X D,HU X T,Measuring in-plane motion of micro-MEMS based on optical flow[J].Nanotechnology and Precision Engineering,2006,4(3):240-244.(in Chinese)

[6] [6] The annual progress report of the research laboratory of electronics at the Massachusetts Institute of Technology(MIT),1999:NO.142[R/OL].Http://www.rle.mit.edu/media/pr142/20.pdf.

[7] [7] HIROVUKI O,HISASHI S.Detection of rotation and parallel translation using Hough and Fourier transforms[J].IEEE Inter.Conf.Image processing,1996:827-830.

[8] [8] LOH K H,ER M H,HUI S K.High accuracy registration of translated and rotated images using hierarchical method[J].IEEE Inter Conf.Acoustics,Speech and Signal Processing,2000:2211-2214.

[9] [9] ERTURK S.Translation,rotation and scale stabilization of image sequences [J].Electronics Letters,2003,39(17):1245-1246.

[10] [10] MA J,XU K H,TAN L Y.Extend-beacon tracking for deep space optical communication based on phase-correlation[J].Opt.Precision Eng.,2006,14(3):180-184.(in Chinese)

[11] [11] GAO Y Y,YANG J F,MA X L,et al.Interference image registration based on Fourier-Mellin algorithm[J].Opt.Precision Eng.,2007,15(9):1415-1420.(in Chinese)

[12] [12] HILL L,VLACHOS T.Motion measurement using shape adaptive phase correlation[J].Electronics Letters,2001,37(25):1512-1513.

[13] [13] KELLY B T,MADISETTI V K.The fast discrete radon transform-I:Theory [J].IEEE transaction on Image Processing,1993,2(3):382-400.

[14] [14] HU X D,LI D C,GUO T,et al..Optical measurement platform for micro-structures characterization[J].Acta Optica Sinica,2005,25(6):803-808.(in Chinese)