Optics and Precision Engineering, Volume. 17, Issue 8, 1884(2009)
High resolution measurement of MEMS rotation angle by phase correlation method
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CHEN Zhi, ZHU Hong-cheng, HU Xiao-dong, HU Xiao-tang. High resolution measurement of MEMS rotation angle by phase correlation method[J]. Optics and Precision Engineering, 2009, 17(8): 1884
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Received: Oct. 6, 2008
Accepted: --
Published Online: Oct. 28, 2009
The Author Email: Zhi CHEN (ch-z@163.com)
CSTR:32186.14.
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