To realize the high resolution measurement of rotation motion to get the characteristic and dynamic parameters of MEMS resonators in every moment,this paper presents a method to measure the rotation angle based on the combination of Radon transform and phase correlation for the motion image sequences of microstructures collected by a stroboscopic imaging technology.By the Radon transform,the motion in Descartes coordinates is transferred to parameters of polar coordinates,so that the rotation motion is projected to displacements of parameters.Then,the displacements are measured by a phase correlation method to realize a subpixel motion measurement.Experimental results show that the resolution power of rotation angle is superior to 0.01°.MEMS motion process is analyzed by the method,and the offered solutions indicate that the influence of the distortion caused by rotation is deceased,while the repetition of measurement is increased.