Fig. 1. (a) Distribution of equivalent resistance of SGT MOS; (b) equivalent DC circuit of SGT MOS.

Fig. 2. (a) Distribution of capacitance and charge of SGT MOS; (b) equivalent capacitance circuit of SGT MOS.

Fig. 3. Schematic diagrams of structure before equivalence (a) and after equivalence (b).

Fig. 4. The curves of (a) transfer characteristic, (b) transconductance G_m, (c) output characteristic and (d) output conductance G_DS at 25 ℃.

Fig. 5. The curves of (a) transfer characteristic, (b) transconductance G_m, (c) output characteristic and (d) output conductance G_DS at 150 ℃.

Fig. 6. Capacitance curves on bias voltage: (a) Curve of C_GD on V_DS; (b) curve of C_GS on V_DS; (c) curve of C_DS on V_DS; (d) curves of C_iss, C_oss and C_rss on V_DS.

Fig. 7. Verification of switching characteristic: (a) Switching characteristic test circuit; (b) switching characteristic curve at I_on = 10 A