Journal of Applied Optics, Volume. 44, Issue 5, 992(2023)

Design of dispersive objective of chromatic confocal for scratch detection

Jin ZHANG1... Yang XIANG1,*, Lei HUANG2 and Yanhong DOU2 |Show fewer author(s)
Author Affiliations
  • 1School of Electro-optical Engineering, Changchun University of Science and Technology, Changchun 130022, China
  • 2Jilin Key Laboratory of Measuring Instrument and Technology, Jilin Institute of Metrology, Changchun 130103, China
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    References(15)

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    [4] Qian LIU, Weichuan YANG, Daocheng YUAN et al. Design of linear dispersive objective for chromatic confocal microscope. Optics and Precision Engineering, 21, 2473-2479(2013).

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    [6] Yu TIAN, Bin LIU. Design of dispersion lens for chromatic confocal displacement sensor. Optical Technique, 44, 381-384(2018).

    [7] Jikai WANG, Yang XIANG, Peifang WANG. Study on diffraction efficiency of infrared double-layer diffractive optical element. Journal of Changchun University of Science and Technology(Natural Science Edition), 39, 25-29(2016).

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    [9] Qing LIANG, Dan XUE, Xingyu WU. Lens design for chromatic confocal displacement sensor. Optical Technique, 45, 653-659(2019).

    [10] Qian LIU, Weichuan YANG, Daocheng YUAN et al. Optimization and selection of materials for dispersive objective of chromatic confocal microscope. Opto-Electronic Engineering, 39, 111-117(2012).

    [11] Kai YAN. Research of thickness detection system based on spectral confocal(2018).

    [12] J NOVAK, A MIKS. Hyperchromats with linear dependence of longitudinal chromatic aberration on wavelength. Optik - International Journal for Light and Electron Optics, 116, 165-168.(2005).

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    Jin ZHANG, Yang XIANG, Lei HUANG, Yanhong DOU. Design of dispersive objective of chromatic confocal for scratch detection[J]. Journal of Applied Optics, 2023, 44(5): 992

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    Paper Information

    Category: Research Articles

    Received: Nov. 15, 2022

    Accepted: --

    Published Online: Mar. 12, 2024

    The Author Email: XIANG Yang (向阳)

    DOI:10.5768/JAO202344.0501007

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