Design of dispersive objective of chromatic confocal for scratch detection

Table 1. Parameter settings of optical system
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Table 1. Parameter settings of optical system
参数指标
光学总长 /mm <120
焦距/mm 30～40
工作距离/mm <40
像方NA >0.25
物方NA >0.25
口径/mm <30
波长 /nm 400～700
色散范围/mm 1

Table 2. Key operand settings
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Table 2. Key operand settings
操作数序号类型参数设置目标权重
10 LONA Surf 0 Zone 1 0 1
11 SPHA Surf 0 Wave 1 0 1
21 DIFF Op#19 Op#16 0.34 1
25 EQUA Op#21 Op#22 0 1
33 REAY Wave1 Py 1 0 1.00E+004

Table 3. Dispersive objective lens parameters

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Table 3. Dispersive objective lens parameters

镜片序号	材料	前表面曲率/mm	后表面曲率/mm	厚度/mm	光焦度
1	H-ZLAF55F	−570.34	−40.00	21.61	0.020 6
2	LASF35	793.96	32.66	3.05	−0.012 5
3	H -ZK9B	32.36	−70.00	7.98	−0.004 1
4	H -ZLAF2A	32.27	−206.52	9.25	0.029 3
5	H -ZLAF72	−78.89	454.28	13.73	−0.014 5

Table 4. Tolerance analysis results
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Table 4. Tolerance analysis results
波长/nm 艾里斑半径 /μm RMS半径/μm（80% 蒙特卡罗分析结果）
400 1.260 1.213
500 1.458 1.321
600 1.762 1.535
700 2.103 1.490

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Jin ZHANG, Yang XIANG, Lei HUANG, Yanhong DOU. Design of dispersive objective of chromatic confocal for scratch detection[J]. Journal of Applied Optics, 2023, 44(5): 992

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