Acta Optica Sinica, Volume. 42, Issue 17, 1714005(2022)

High Throughput Laser Nano Direct Writing Technique

Xu Liu1,2、* and Cuifang Kuang1,2
Author Affiliations
  • 1State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, Zhejiang,China
  • 2Zhejiang Laboratory, Hangzhou 311121, Zhejiang, China
  • show less
    Figures & Tables(9)
    LDW with two laser beams[15-21]
    Multi-channels LDW technique[24-27]
    Principle of TP-LDW, PPI-LDW, and multi-channel PPI-LDW[30]
    Jablonski plot of PPI photoresist (Rim-P) and two writing mode (oil mode & dip-in mode)
    3D hollow spot. (a) Schematic of 3D hollow spot modulated with SLM; (b) modulation module of 3D hollow spot; (c) intensity distribution of 3D hollow spot in front focal plane of objective lens; (d) linewidth corresponding to inhibition laser off or on
    Beam stabilization. (a) Schematic of beam stabilization module; (b) position and (c) angle drift of beam without drift control;(d) position and (e) angle drift of beam with drift control
    Six channels LDW. (a) Schematic of six channels LDW system; (b) CAD module corresponding to Fig. 7(a), the inset is photo of real product; (c) six channels excitation and inhibition beams generated by SLM
    Different micro/nano-structure devices written by PPI-LDW
    • Table 1. Chemical components and photophysical performance for Rim-P series photoresist

      View table

      Table 1. Chemical components and photophysical performance for Rim-P series photoresist

      SampleResin composite*nε390 /(104 L·mol-1·cm-1IFlo532 /(104 arb.units)τsam /nsPth /mW
      Rim-P1

      38.7% PETA

      61.3% BPADA

      1.5181.613.7404.723.71
      Rim-P2

      69.5% PETA

      30.5% BPFDA

      1.5181.680.2623.972.23
      Rim-P3

      86.0% TCDA

      14.0% BPFDA

      1.5182.610.5213.303.00
      Rim-P0100.0% PETA1.4842.330.3194.332.30
    Tools

    Get Citation

    Copy Citation Text

    Xu Liu, Cuifang Kuang. High Throughput Laser Nano Direct Writing Technique[J]. Acta Optica Sinica, 2022, 42(17): 1714005

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Lasers and Laser Optics

    Received: Jun. 28, 2022

    Accepted: Aug. 13, 2022

    Published Online: Sep. 16, 2022

    The Author Email: Liu Xu (liuxu@zju.edu.cn)

    DOI:10.3788/AOS202242.1714005

    Topics