Opto-Electronic Engineering, Volume. 37, Issue 3, 39(2010)
Zooming Method for Microlens Array Imaging Photolithography
[1] [1] WU Hong-kai,Teri W Odom,Geoger M. Whitesides. Generation of Crome Masks Micrometer—scale Features using Microlens Lithrography [J]. Adv mate(S0935-9648),2002,14(17):1213-1216.
[2] [2] Ming-Hsien Wu,George M Whitesides. Fabrication of arrays of two–demsional micropatterns using microspheres as lenses for projection photolithography [J]. Appl.Phys. Lett(S0003-6951),2001,78(16):2273-2275.
[3] [3] DU Chun-lei,DONG Xiao-chun,QIU Chuan-kai,et al. Profile control technology for high-performance microlensarray [J]. Opt. Eng(S0091-3286),2004,43(11):2595-2602.
[6] [6] WU Hong-kai,Teri W Odom,George M Whitesides. Reduction Photolithography Using Microlens Arrays:Applications in Gray Scale Photolithography [J]. Anal. Chem(S1520-6882),2002,74(14):3267-3273.
[7] [7] Ming-Hsien Wu,Kateri E Paul,George M. Whitesides. Patterning flood illumination with microlens arrays [J]. Applied Optics(S0003-6935),2002,41(13):2575-2585.
[8] [8] WEI Ren-xuan,ZHOU Zu-de,JIANG De-sheng. On the Relationship Between Target Ubiety Relative to Laser Focus and Yielded Shape in Excimer Laser Direct Micro-fabrication [J]. Journal of Wuhan University of Technology,2003,25(8):52-54.
[9] [9] Warren J Smith. Modern Optical Engineering [M]. New York:McGrow–hill companies,Inc,2000.
[10] [10] YU Dao-yin,TAN Heng-ying. Optical Engineering [M]. Beijing:Mechanical Industry Press,2006.
[11] [11] YUAN Xu-cang. Optical Design [M]. Beijing:Beijing University of Technology Press,1988.
[12] [12] Born M,Wolf E. Principle of Optics:7th ed [M]. Cambridge:University Press,1999.
[13] [13] Goodman J W. Introduction to Fourier Optics:3th ed [M]. Roberts and Company Publishers,2004.
[14] [14] Bracewell R N. The Fourier Transform and Its Application:3th ed [M]. New York:McGraw–Hill,2000
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ZHANG Wei-guo, DONG Xiao-chun, DU Chun-lei. Zooming Method for Microlens Array Imaging Photolithography[J]. Opto-Electronic Engineering, 2010, 37(3): 39
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Received: Nov. 23, 2009
Accepted: --
Published Online: Jun. 13, 2010
The Author Email: Wei-guo ZHANG (cldu@ioe.ac.cn)