Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Opto-Electronic Engineering, Volume. 37, Issue 3, 39(2010)

Zooming Method for Microlens Array Imaging Photolithography

ZHANG Wei-guo1...2,*, DONG Xiao-chun1 and DU Chun-lei1 |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
    • show less
    AbstractGet PDF
    Figures&Tables (0)
    Equations (0)
    References (14)
    Tools
    Paper Information
    Topics
    Figures & Tables(0)
    Tools

    Get Citation

    Copy Citation Text

    ZHANG Wei-guo, DONG Xiao-chun, DU Chun-lei. Zooming Method for Microlens Array Imaging Photolithography[J]. Opto-Electronic Engineering, 2010, 37(3): 39

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category:

    Received: Nov. 23, 2009

    Accepted: --

    Published Online: Jun. 13, 2010

    The Author Email: Wei-guo ZHANG (cldu@ioe.ac.cn)

    DOI:10.3969/j.issn.1003-501x.2010.03.008

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology