Journal of Applied Optics, Volume. 45, Issue 5, 1072(2024)

Experimental study on back-illuminated CMOS image sensor irradiated by CW laser

Yongbo XU1...2, Yunzhe WANG1,2, Changbin ZHENG1, Yang LIU1, Xiangzheng CHENG3 and Junfeng SHAO1,* |Show fewer author(s)
Author Affiliations
  • 1State Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Key Laboratory of Electro-Optic Countermeasures Test & Evaluation Technology, Luoyang Electronic Equipment Test Center of China, Luoyang 471003, China
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    Compared to the front-illuminated structure, the back-illuminated complementary metal oxide semiconductor (CMOS) image sensor significantly improves the shooting effect in low light environments, and lasers have different interference and damage mechanisms on different sensor structures. To investigate the impact of lasers on back-illuminated CMOS image sensors, experiments were conducted using a 1 064 nm continuous laser to study the interference and damage. In the interference experiment, saturation and over saturation phenomena were observed. When the laser power density exceeded 1.39×10?2 W/cm2, saturation occurred, and when it exceeded 1.03×104 W/cm2, over saturation occurred. In the damage experiment, spot damage, crossline damage, surface damage, and blindness were observed. When the power density exceeded 1.35×106 W/cm2, spot damage occurred, and when it exceeded 1.74×106 W/cm2, crossline damage occurred. When the power density exceeded 1.65×107 W/cm2, surface damage occurred. If the laser power was further increased, the detector ultimately became blind. The back-illuminated structure circuit is deeper than the front-illuminated structure and requires higher laser power for damage, Therefore, it has stronger laser resistance.

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    Yongbo XU, Yunzhe WANG, Changbin ZHENG, Yang LIU, Xiangzheng CHENG, Junfeng SHAO. Experimental study on back-illuminated CMOS image sensor irradiated by CW laser[J]. Journal of Applied Optics, 2024, 45(5): 1072

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    Paper Information

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    Received: Sep. 20, 2023

    Accepted: --

    Published Online: Dec. 20, 2024

    The Author Email: SHAO Junfeng (邵俊峰)

    DOI:10.5768/JAO202445.0507003

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