Research on a kind of polarized interferometer's optical system for nanometer measurement

[2] [2] Downs M J, Nunn J W. Verification of the sub-nanometric of an NPL differential plane mirror interferometer with a capacitance probe[J]. Meas Sci Technol, 1998,9(7-9):1437-1440.

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research on a kind of polarized interferometer's optical system for nanometer measurement[J]. Infrared and Laser Engineering, 2004, 33(1): 21

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Paper Information

Category:

Received: Jun. 24, 2003

Accepted: Aug. 10, 2003

Published Online: May. 25, 2006

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Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology