Infrared and Laser Engineering, Volume. 33, Issue 1, 21(2004)

Research on a kind of polarized interferometer's optical system for nanometer measurement

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research on a kind of polarized interferometer's optical system for nanometer measurement[J]. Infrared and Laser Engineering, 2004, 33(1): 21

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    Received: Jun. 24, 2003

    Accepted: Aug. 10, 2003

    Published Online: May. 25, 2006

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