[1] [1] Quake S R and Scherer A 2000 From micro- to nanofabrication with soft materials Science 290 1536–40

[2] [2] Xia Y N and Whitesides G M 1998 Soft lithography Annu. Rev. Mater. Sci. 28 153–84

[3] [3] Wu B Q, Kumar A and Pamarthy S 2010 High aspect ratio silicon etch: a review J. Appl. Phys. 108 051101

[4] [4] Kooy N, Mohamed K, Pin L T and Guan O S 2014 A review of roll-to-roll nanoimprint lithography Nanoscale Res. Lett. 9 320

[5] [5] Kim H B, Hobler G, Steiger A, Lugstein A and Bertagnolli E 2007 Full three-dimensional simulation of focused ion beam micro/nanofabrication Nanotechnology 18 245303

[6] [6] Altissimo M 2010 E-beam lithography for micro-/nanofabrication Biomicrofluidics 4 026503

[7] [7] Sugioka K and Cheng Y 2014 Femtosecond laser three-dimensional micro- and nanofabrication Appl. Phys. Rev. 1 041303

[8] [8] Malinauskas M, ?ukauskas A, Hasegawa S, Hayasaki Y, Mizeikis V, Buividas R and Juodkazis S 2016 Ultrafast laser processing 2016 of materials: from science to industry Light Sci. Appl. 5 e16133

[9] [9] Kim M, Kim D J, Ha D and Kim T 2016 Cracking-assisted fabrication of nanoscale patterns for micro/nanotechnological applications Nanoscale 8 9461–79

[10] [10] Li B, Cao Y P, Feng X Q and Gao H J 2012 Mechanics of morphological instabilities and surface wrinkling in soft materials: a review Soft Matter 8 5728–45

[11] [11] Liu Z, Cui A J, Li J J and Gu C Z 2019 Folding 2D Structures into 3D configurations at the micro/nanoscale: principles, techniques, and applications Adv. Mater. 31 1802211

[12] [12] Zhang D S and G?kce B 2017 Perspective of laser-prototyping nanoparticle-polymer composites Appl. Surf. Sci. 392 991–1003

[13] [13] Hughes R A, Menumerov E and Neretina S 2017 When lithography meets self-assembly: a review of recent advances in the directed assembly of complex metal nanostructures on planar and textured surfaces Nanotechnology 28 282002

[14] [14] Kondic L, Gonz′alez A G, Diez J A, Fowlkes J D and Rack P 2020 Liquid-state dewetting of pulsed-laser-heated nanoscale metal films and other geometries Annu. Rev. Fluid Mech. 52 235–62

[15] [15] Lao Z X, Pan D, Yuan H W, Ni J C, Ji S Y, Zhu W L, Hu Y L, Li J W, Wu D and Chu J R 2018 Mechanical-tunable capillary-force-driven self-assembled hierarchical structures on soft substrate ACS Nano 12 10142–50

[16] [16] Zhang D S, G?kce B and Barcikowski S 2017 Laser synthesis and processing of colloids: fundamentals and applications Chem. Rev. 117 3990–4103

[17] [17] Yang L et al 2017 High efficiency fabrication of complex microtube arrays by scanning focused femtosecond laser Bessel beam for trapping/releasing biological cells Opt. Express 25 8144–57

[18] [18] Hu Y L, Lao Z X, Cumming B P, Wu D, Li J W, Liang H Y, Chu J R, Huang W H and Gu M 2015 Laser printing hierarchical structures with the aid of controlled capillary-driven self-assembly Proc. Natl Acad. Sci. USA 112 6876–81

[19] [19] Lao Z X, Hu Y L, Zhang C C, Yang L, Li J W, Chu J R and Wu D 2015 Capillary force driven self-assembly of anisotropic hierarchical structures prepared by femtosecond laser 3D printing and their applications in crystallizing microparticles ACS Nano 9 12060–9

[20] [20] Skeen C H and York C M 1968 Laser-induced “blow-off” phenomena Appl. Phys. Lett. 12 369–71

[21] [21] Zhang D S, Ranjan B, Tanaka T and Sugioka K 2020 Carbonized hybrid micro/nanostructured metasurfaces produced by femtosecond laser ablation in organic solvents for biomimetic antireflective surfaces ACS Appl. Nano Mater. 3 1855–71

[22] [22] Tsuji T, Okazaki Y, Tsuboi Y and Tsuji M 2007 Nanosecond time-resolved observations of laser ablation of silver in water Jpn. J. Appl. Phys. 46 1533–5

[23] [23] Dell’Aglio M, Gaudiuso R, De Pascale O and De Giacomo A 2015 Mechanisms and processes of pulsed laser ablation in liquids during nanoparticle production Appl. Surf. Sci. 348 4–9

[24] [24] Gregg D W and Thomas S J 1966 Momentum transfer produced by focused laser giant pulses J. Appl. Phys. 37 2787–9

[25] [25] Montross C S, Wei T, Ye L, Clark G and Mai Y W 2002 Laser shock processing and its effects on microstructure and properties of metal alloys: a review Int. J. Fatigue 24 1021–36